Integrated Microsensors and Sensor Systems for Industrial
Applications
Sponsored by NATO Science for Stability Programme (1996-1999)
Project Director
Asst. Prof. Dr. Tayfun
AKIN
Introduction
Solid-state microsensors and actuators have gained attention in the
recent years in the world, and there has been an extensive world-wide
research activity to develop miniaturized and low cost solid-state
sensors and actuators, ranging from pressure sensors and infrared
detectors to ultra-sensitive flow meters, accelerometers, and
micromotors. These devices and microsystems are also known as
Micro-Electro-Mechanical Systems (or shortly MEMS). These
devices are fabricated in volume using techniques similar to those used
for integrated circuits along with silicon micromachining techniques and
offer better performances, higher reliability, and smaller size and cost
than their discrete counterparts.
The main objectives of this project are to introduce MEMS or
microsystems technology to the Turkish Industry and to design and
implement integrated microsensors and sensor systems for the production
of high-tech sensor-based electronic products by Turkish Industry. This
objective will be realized by enhancing the existing solid-state
facilities in Turkey for microsensor development, working with companies
in Turkey for development of industrial products, and initiating
international collaboration for the establishment of necessary expertise.
Project Structure
The scope of this project is the development of three microsensor
products:
CMOS merged Schottky-Barrier Platinum-Silicide (PtSi) detector
focal-plane-array (FPA) to be used in an infrared camera for commercial
applications. This detector is developed in collaboration with IMEC in
Belgium. The director of this sub-project is Asst. Prof. Dr. Tayfun AKIN.
Indium-Antimonide (InSb) infrared detector line array to be used in
an infrared camera for commercial applications. This detector is
developed in collaboration with Northwestern University in USA. The
director of this sub-project is Asst. Prof. Dr. Cengiz
BESIKCI.
Solid-state micromachined pressure sensor for process control
applications. This pressure sensor is developed in collaboration with
The University of Michigan. The director of this sub-project is Asst. Prof. Dr. Tayfun AKIN.
Expected Impact of the Project
The project is expected to have the following impact:
* Design and implementation of integrated microsensors and sensor
systems for Turkish Industry
* Gaining access to the state-of-the-art in microsensor and silicon
micromachining technologies
* Improvement of competitiveness of Turkish Industry in the world market
* Establishment of a highly trained group in microsensor design and
fabrication
* Promotion of collaboration between the university and industry
* Establishment of links with foreign institutions
Sponsoring Organizations
TUBITAK-BILTEN
(Information Technologies and Electronics Research Institute)
Middle East Technical University
06531 Ankara, Turkey
Tel: 90 (312) 210 13 10
Fax: 90 (312) 210 13 15
Middle East Technical
University
TR-06531 Ankara, Turkey
Participating Organizations
ASELSAN Inc.
MGEO Division
Akyurt, Ankara, Turkey
ELIMKO Electronics Instrumentation and Control Company Ltd.
Ankara, Turkey
Collaborating International Organizations
IMEC, Leuven, Belgium
Northwestern University, USA
The University of
Michigan, USA