MEMS Links

About MEMS Technology (a page prepared by MEMS Clearinghouse)

DARPA's MEMS Page

DARPA's MEMS Vision Statement

DARPA's Core Technology Areas, including MEMS Links

IDA MEMS Technology Transition

List of Companies and Research Centers Developing MEMS (just click on "SEARCH" for the full list)

Tutorial Information about MEMS

MEMS Information Clearinghouse

US Department of Defense (DoD) Report on Micro-Electro-Mechanical Systems (MEMS)(in pdf format)

European Microsystems Technology On-Line

CMSM MEMS Home Page (with many well organized MEMS Links)

MEMS Database and Links

MEMS Virtual Learning Cybercenter and Edu Pages

MEMS-Exchange (MEMS Fabrication Network)

Links to Micro-Electro-Mechanical Systems (MEMS) related pages

Industrial Search Engine for Microsystems Technologies, MEMS, and Micromachining

CRONOS Integrated Microsystems Inc.

iMEMS Home Page

The Berkeley Sensor and Actuator Center

What is MEMS? from the University of Wisconsin UW-MEMS group.

Santa Barbara Research Center Infrared Detector Tutorial

MEMS Component Database

European MicroSystem Technology Online

Sensorsportal

Center at Michigan for Wireless Microsystems Microsystems (NSF-University-Industry Collaboration)

Small Times: News about MEMS, Nanotechnology, and Microsystems

MEMS Conferences

TRANSDUCERS'03 Conference

TRANSDUCERS'01 & EUROSENSORS XV Conference

MEMS2004 Conference

MEMS2003 Conference

MEMS2002 Conference

MEMS2001 Conference

EUROSENSORS 2004

EUROSENSORS 2002

EUROSENSORS 2000

2000 Solid-State Sensor and Actuator Workshop

Int'l Conference on Optical MEMs (MOEMS 2002)

IEEE Optical MEMS (MOEMS) Conference

Commercialization of Microsystems 2000

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Other Links

METU-MET Microelectonics Factory

METU-MEMS Research Group

Mentor Handouts

EE 413 Home Page

The University of Michigan CAEN Homepage

IBM Patent Server Home Page

US PATENT AND TRADEMARK OFFICE

Sensors and Actuators A: Physical

Journal of Micromechanics and Microengineering

IEEE Xplore

Sensors and Materials

Web of Science (ISI)

Elsevier Science Direct

SPIE PRESS Search

Engineering  Village 2  (EV2) (EI Compendex, EI Website Abstracts, US Patent and Trademark Office)